INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 138)

5 - 26
PN
07
4-
44
6-
P1
J
XTC/3 Operating Manual
6
(0x06)
1 Sensor 1 Type 0 = Single
1 = CrystalTwo
2 = CrystalSix
3 = Crystal12
4 = Rotary
5 = Dual Head
Int 0 5
7
(0x07)
1 Sensor 2 Type 0 = Single
1 = CrystalTwo
2 = CrystalSix
3 = Crystal12
4 = Rotary
(On Query only:
5 = Dual Head)
Int 0 4
(5 for
Query
comm-
and)
8
(0x08)
1 Source
Control Voltage
0 = 0 to +10
1 = 0 to -10
2 = 0 to +5
3 = 0 to -5
4 = 0 to +2.5
5 = 0 to -2.5
Int 0 5
9
(0x09)
Recorder Mode 0 = Rate
1 = Thickness
2 = Power
3 = Rate Deviation
Int 0 3
10
(0x0a)
Recorder Range 0 = 100
1 = 1000
Int 0 1
11
(0x0b)
Recorder Filter 1 = Smooth
0 = Unfiltered
Int 0 1
12 (0x0c) Audio Feedback 1 = Yes, 0 = No Int 0 1
13 (0x0d) Dim LCD Minutes Int 0 99
14
(0x0e)
RS232 Baud Rate 0 = 9600
1 = 19200
2 = 38400
3 = 57600
4 = 115200
Int 0 4
Table 5-3 Standard general parameters (continued)
UG
(0x5547)
Command
ID
Name Units / Allowed
Values / Notes
Data
Type /
Format
Low
Limit
High
Limit