INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 58)

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XTC/3 Operating Manual
3.3.6 I/O Map Display
Figure 3-9 XTC/3M I/O Map display
The I/O Map screen displays the currently selected programmable I/O functions on
XTC/3M or the fixed I/O in XTC/3S. See
section 4.5 on page 4-26 for XTC/3M
programming details.
3.3.7 Diagnostics Display
Figure 3-10 Diagnostics display
The Diagnostics display is described under section 6.2, XTC/3 Diagnostics, on
page 6-6 . The Diagnostics display:
 shows firmware version
 shows main board serial number
 shows Crystal Interface Unit (XIU) serial number
 permits testing the RS 232 interface
 permits testing the active XIU.
 allows toggling source and sensor shutters
 allows checking crucible rotation.