INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
Cruc 2 Valid
(M only)
Application of a ground reference voltage from the crucible rotation
mechanism is used to signal that the proper crucible for Source 2 has
indexed into position and state sequencing may proceed
Reset (M, S if Film
Select option used)
Detection of a falling edge effects a RESET if in Stop.
Sel Process (4)
(M only)
The state of the two associated inputs determines the process, 1 to 4, to
be selected when a START is processed while the unit is in Ready or Idle
of the last layer. 00 for 1, 01 for 2, 10 for 3 and 11 for 4.
Sel Process (16)
(M only)
As above, except four inputs are used to select process 1 to 16.
Sel Process (64)
(M only)
As above, except six inputs are used to select process 1 to 64.
Sel Process (99)
(M only)
As above, except seven inputs are used to select process 1 to 99.
Switch Crystal
(M only)
Detection of a falling edge duplicates the front panel XTSW.
Non-Dep Hold
(M only)
This feature “holds” the state timer during any non-deposit state.
Non-deposit states include the pre-deposit states: Ready, Crucible
Switch, Rise 1, Soak 1, Rise 2, Soak 2; and the post-deposit states: Idle
Ramp and Idle. For the feature to be activated, the state’s time must be
non zero. The message NON-DEP HOLD is displayed. If XTC/3 is in the
READY or IDLE state and a START command is executed while
NON-DEP HOLD is active, XTC/3 will progress to the first pre-deposit
state with a non zero state time. If XTC/3 is in the Crucible Switch state,
waiting for the Cruc Valid input, and NON-DEP HOLD is activated when
the Cruc Valid input is activated, XTC/3 will progress to the next
pre-deposit state having a non zero state time. XTC/3 is prevented from
continuing state processing until the action is deactivated.
Zero Film Time
(M only)
Detection of a falling edge will zero the Layer Deposit time for the Layer
being deposited.
Start Inhibit (M only)
Prevents starting a layer as long as the input remains active.
Soak 1 Hold
(M only)
Application of a ground reference voltage extends the SOAK 1 state
until the signal/closure is removed.
Film Select (S only)
Table 3-3 Inputs (continued)
Input Function
Description