3 replacement cables & oscillators, 4 sensors – INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual

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XTC/3 Operating Manual

All shuttered sensors and all multi-position sensors require a feedthrough with an
air line and a solenoid valve.

Solenoid Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . PN 750-420-G1

1.6.3 Replacement Cables & Oscillators

Oscillator to vacuum feedthrough
BNC cable, 15.2 cm (6 in.) . . . . . . . . . . . . . . . . . . . . . . . . . . PN 755-257-G6

Oscillator to vacuum feedthrough
BNC cable, 50.8 cm (20 in.) . . . . . . . . . . . . . . . . . . . . . . . . . PN 755-257-G20

4 m / 6 in. XIU Cable Kit,
consists of PN 755-257-G6,
(6 in. BNC cable) and PN 321-039-G16,
(4.0 m In-Vacuum Sensor Cable). . . . . . . . . . . . . . . . . . . . . .PN 760-700-G6

4 m / 20 in. XIU Cable Kit,
consists of PN 755-257-G20,
(20 in. BNC cable) and PN 321-039-G15,
(3.5 m In-Vacuum Sensor Cable). . . . . . . . . . . . . . . . . . . . . PN 760-701-G20

XTC/3 Unit to Oscillator Cable, 4.6 m (15 ft.) . . . . . . . . . . . . PN 600-1261-P15

XTC/3 Unit to Oscillator Cable, 9.2 m (30 ft.) . . . . . . . . . . . . PN 600-1261-P30

XTC/3 Unit to Oscillator Cable, 15.3 m (50 ft.) . . . . . . . . . . . PN 600-1261-P50

XTC/3 Unit to Oscillator Cable, 30.5 m (100 ft.) . . . . . . . . . . PN 600-1261-P100

Standard XTC/3 oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . PN 781-600-G1

4 m XTC/3 oscillator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . PN 781-600-G2

1.6.4 Sensors

XTC/3 is compatible with the following INFICON sensor types:

Front Load Single Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . PN SL-xxxx

Front Load Dual sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . PN DL-Axxx

Cool Drawer Single sensor . . . . . . . . . . . . . . . . . . . . . . . . . PN CDS-xxFxx

Cool Drawer Dual sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . PN CDD-xxFxx

Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . PN 750-618-G1

Front Load Bakeable sensor . . . . . . . . . . . . . . . . . . . . . . . . PN BK-AxF

CrystalSix sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . PN 750-446-G1

Crystal12 sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . PN XLI2-1xxxxx

RSH-600 sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . PN 15320x-xx