INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual

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XTC/3 Operating Manual

R12. . . . . Zero thickness. Simulates remote input or front panel ZERO keystroke.

R13. . . . . Final thickness-end deposit trigger. Simulates remote input.

R14. . . . . CrystalSwitch. Equivalent to front panel XTSW keystroke.

R15. . . . . XTC/3S only. Enter communication I/O mode — See R16 (Only applies

when in communication I/O mode)

R16. . . . . XTC/3S only. Exit communication I/O mode — See R15 (Only applies

when in communication I/O mode)

R17. . . . . Set (close) relay xx (xx = 1-12) (Works also in XTC/3M if that output has

been selected as "Computer Contl" type)

R18. . . . . Clear (open) relay xx (xx = 1-12) (Works also in XTC/3M if that output

has been selected as "Computer Contl" type)

R19. . . . . Turn backlight ON

R20. . . . . Turn backlight OFF

R21. . . . . Trigger beeper

R22. . . . . Clear Error Flag

R23. . . . . Not supported

R24. . . . . Not supported

R25. . . . . Set upper frequency limit to 6.027 MHz. (This command is accepted

but not executed since the default upper frequency limit
exceeds 6.027 MHz.)

The following additional commands were available on XTC/C only:

R30. . . . . Test ON

R31. . . . . Test OFF

R32. . . . . Control Mode Deposit

R33. . . . . Control Mode Etch

R34. . . . . Stop on Alarms

R35. . . . . No Stop on Alarms

R36. . . . . Stop on Max Power

R37. . . . . No stop on Max Power