INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual

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XTC/3 Operating Manual

AUTOSTART NEXT LAYER Yes / No (XTC/3M only)

Press the TOGL key to move through the choices. Default is No.
Yes enables automatically starting the next layer in the process when the previous
layer reaches the Idle state, unless that layer is the last layer in the process.
This function is not available in XTC/3S.

START WITHOUT BACKUP Yes / No

Press the TOGL key to move through the choices. This option is pertinent only
when a multi-position sensor is in use. In the default mode No, a layer cannot be
started unless there is at least one known working backup crystal available.
If set to Yes, a layer may be started without a working backup crystal.

STOP ON ALARMS. . . . . . . Yes / No

Press the TOGL key to move through the choices. Default setting is No.
Alarm conditions are defined in

section 3.5.1 on page 3-23

STOP ON MAX POWER . . . Yes / No

Press the TOGL key to move through the choices. Default setting is No. If set
to Yes, XTC/3 will stop if Max Power condition has been true for 5 seconds
continuously.

DEP/ETCH MODE . . . . . . . . Deposit / Etch

Press the TOGL key to move through the choices. Default mode is Deposit. By
setting the mode to Etch, XTC/3 may be configured to display the thickness or
mass removed from the face of a crystal. It is imperative that the material be
removed uniformly over the active area of the crystal or improper readings will be
taken. This inaccuracy occurs because of radial mass sensitivity differences across
the face of the monitor crystal.

The unit is operated normally, with the ZERO key used to zero the displayed
thickness. The FINAL THICKNESS parameter may be programmed to terminate
the process.

TEST . . . . . . . . . . . . . . . Yes / No

Press the TOGL key to move through the choices. The default is No. XTC/3
contains a software controlled Test Mode which simulates actual operation. The
purpose of the Test Mode is to verify basic operation and for demonstrating typical
operation to the technician.

The Rate displayed during Test Mode operation is determined as follows:

[2]

Relays, inputs, source and recorder outputs operate normally during Test Mode
but Crystal fails are ignored.

Displayed Rate

DENSITY (gm/cc)

----------------------------------------------- TOOLING (%)

100%

---------------------------------------



Å/sec