4 source parameters – INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
4.2.3.4 Source Parameters
Figure 4-5 Source Film Programming screen
SOURCE . . . . . . . . . . . . 1, 2
This parameter determines which source output is to be used for source control
voltage for the material being defined. The default is 1. This parameter cannot be
changed while the film is running.
CRUCIBLE. . . . . . . . . . . 0 to 8
This parameter can be used to automatically index the turret position when using
a multiple pocket turret source. The value selected denotes which pocket of the
turret source to use on this film. The default value is 0 and indicates a single pocket
source. If a non-zero value is entered, the appropriate outputs are activated
automatically. Source power will not be applied until the appropriate Cruc Valid
input is activated.
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