INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 25)

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XTC/3 Operating Manual
Power Display Range. . . . . . . . . . . . 0.0 to 99.9%
Graphic Display Functions . . . . . . . . Rate Deviation at ± 5, 10, 20, or 40 Å/s or
Power at 0.0 to 100%
Display Data Update Rate . . . . . . . . 1 Hz
1.4.5 Source / Recorder Outputs
Quantity . . . . . . . . . . . . . . . . . . . . . . 3 BNC, Female
Configuration . . . . . . . . . . . . . . . . . . Source 1, Source 2, Recorder
Function Ranges
Source Control . . . . . . . . . . . . . . 0 to 10 V, 0 to -10 V, 0 to 5 V,
0 to -5 V, 0 to 2.5 V, 0 to -2.5 V
Recorder Output . . . . . . . . . . . . . 0 to +10 V
Current rating . . . . . . . . . . . . . . . . . . 25 mA max. per channel on Source 1 and
Source 2, 5 mA max. on Recorder
Resolution . . . . . . . . . . . . . . . . . . . . 15 bits over full range (10 V)
Update Rate . . . . . . . . . . . . . . . . . . . 4 Hz, maximum, (dependent on
source characteristics).
Recorder Output Functions . . . . . . . Rate or Thickness or Power or
Rate Deviation
Recorder Output Ranges
Power . . . . . . . . . . . . . . . . . . . . . 0 to 100%
Rate . . . . . . . . . . . . . . . . . . . . . . 0 to 100 Å/s, 0 to 1000 Å/s
Thickness . . . . . . . . . . . . . . . . . . 0 to 100 Å, 0 to 1000 Å (both ranges modulo)
Rate Deviation . . . . . . . . . . . . . . Desired rate ± 50 Å/s
Accuracy. . . . . . . . . . . . . . . . . . . . . . 2% full scale
1.4.6 Relays / Inputs
Relays . . . . . . . . . . . . . . . . . . . . . . . SPST 2.5 A relays rated @ 30 V (dc) or
30 V (ac) RMS or 42 V (peak) maximum;
12 standard; D sub connector; relays are
normally open in the power off state, may be
programmed to normally open or normally
closed during operation on XTC/3M.
Relay Ratings . . . . . . . . . . . . . . . . . . 100 VA inductive; 2.5 A maximum.