3 cool drawer sensor, Figure 6-3 – INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
Page 181
6 - 19
PN
07
4-
44
6-
P1
J
XTC/3 Operating Manual
Figure 6-3 Front load single sensor (exploded)
6.4.2 Shuttered Front Load Single and Front Load Dual Sensors
There is no difference in the crystal replacement procedure between shuttered and
non-shuttered Front Load Single sensors, since the shutter pivots away from the
crystal opening when the shutter is in the relaxed state.
6.4.3 Cool Drawer Sensor
Follow the procedure below to replace the crystal in a Next Generation Cool
Drawer™ sensor:
1
Using your thumb and index fingers, gently squeeze the sides of the retainer
at the mid section then lift it up, away from the drawer.
See
Standard Crystal Holder
(PN 750-172-G1)
Crystal (PN 008-010-G10)
Fully Coated Face (Gold)
Crystal Retainer
(PN 007-023)
Standard Crystal Sensor
Body (PN 750-207-G1)
In-Vacuum
Cable to XIU
Water Tubes
Finger Spring Contact
(PN 750-171-P1)
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