INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 66)

3 - 20
PN
07
4-
44
6-
P1
J
XTC/3 Operating Manual
Ready (M only)
When each State starts, the old
and new state output are set or
cleared as necessary When each State starts, the old and
new state output are set or cleared
as necessary
Crucib Switch
(M only
Rise 1 (M only)
Soak 1 (M only)
Rise 2 (M only)
Soak 2
Shutter Delay
(M only)
Deposit (M only)
Rate Ramp (M only)
Manual (M only)
Time Power (M only)
Idle Ramp (M only)
Idle (M only)
Max Power (M only) When power reaches max power When power is not at max power
Rate Dev Fail
(M only) When the rate deviation is greater
than 5% or 0.5Å of the desired
rate for 60 seconds or 20 times
the time constant if the time
constant is greater than 3
seconds When rate deviation is within test
limits.
When Idle Ramp is entered
Xtal Sw Fail
(M only) When an attempted crystal switch
fails When another crystal switch is
started
Xtal Switching
(M only) Whenever a crystal switch is
active When the crystal switch is done
Crucib Sw Fail
(M only) No crucible valid input within 30
seconds of a crucible switch When Start or Reset is done.
If Stop on Alarms is set to No, XTC/3
will give the error message but will
not do anything else, it stays in
Crucible Switch. If the Crucible Valid
input becomes set, the output is
cleared
Table 3-2 Output states (continued)
Output Active Inactive