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INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual

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XTC/3 Operating Manual

Command Sub-group = 1 ASCII byte, used with some command groups to
further specify commands.

For command Q and U:

F – Film

G - General

I - Input

N - Film Name

O - Output

P - Process

T - Output Type

No sub-groups are allowed for H, E, S or R.

Command ID = 1 binary byte. Defines specific command within some
command groups and sub-groups.

Parameter = ||||

Byte = 1 byte

Integer = 4 byte, low to high

Float = 4 byte, ANSII standard, single precision, low to high

String = Null terminated series of ASCII characters

Checksum . . . . . . . . . . . . . . . . . . . . 1 byte, sum, modulo 256, of all bytes,

not including length.