INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 43)

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XTC/3 Operating Manual
2.3.3.2.1 System I/O Connector
Table 2-1 System I/O connector
Description Pin # XTC/3S Function
Relay 1 1, 2 Source Shutter 1
Relay 2 3, 4 Source Shutter 2
Relay 3 5, 6 ** Sensor Shutter 1
Relay 4 7, 8 ** Sensor Shutter 2
Relay 5 9, 10 Stop
Relay 6 11, 12 End of Process
Input 1 18 Start
Input 2 19 Stop
Input 3 20 End deposit
Input 4 21 * Sample Initiate
Input 5 22 * Sample Inhibit
Input 6 23 * Crystal Fail Inhibit
Input 7 24 * Zero thickness
Input 8 25
*
Soak 2 Hold
Ground 13,14,15,16,17 Input Common
* These input functions may be reassigned according to Table 2-2 .
** Used for Crystal Switching for a XTC/3S
Table 2-2 Film Select Option selected in XTC/3S General / Process screen
Input # Pin # Function Description
4 21 RESET pin22 pin23 pin24 pin25 Film #
5 22 Film Select MSB 0 0 0 X 1
6 23 Film Select 0 0 1 0 2
7 24 Film Select 0 0 1 1 3
8 25 Film Select LSB 0 1 0 0 4
0 1 0 1 5
0 1 1 0 6
0 1 1 1 7
1 0 0 0 8
1 0 0 1 9
1 X 1 X 1
X = Does not matter