INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 81)

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XTC/3 Operating Manual
Chapter 4
XTC/3 Programming
4.1 Overview
The following basic procedure is used to program XTC/3. If a lock code has been
programmed, it must be entered after cursoring to the Lock Code on the Menu
screen. (All steps do not necessarily have to be followed in the given order.)
1 Make sure XTC/3 is in READY.
Some configuration and process parameters can be changed only while XTC/3
is in READY. Parameters such as tooling, rate, final thickness, control loop
settings and many others can be changed even while a layer is being executed.
For initial configuration, if the Operate display does not show READY,
press STOP then RESET.
2 Define Film(s)
Defining a film consists of entering parameters in five sub-screens:
 Pre/Post (Deposit)
 Deposit
 Sensor
 Source
 Option
These parameters establish source preconditioning and cool-down,
deposition rate, final thickness, control loop characteristics and other details
such as density, Z-Ratio, and tooling. Also, a specific sensor and source are
associated with each film. In XTC/3M, all films can be given names.
3 Define Process(es) (XTC/3M only)
Only one Process can be active at any time. All processes can be given a
specific name. A process is an ordered set of Films. Films are entered in the
desired layer order on the PROCESS display. A Film becomes a layer when it
is entered in the Process. Only one layer can be active at any time.
In XTC/3M, all processes can be given names.