INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 44)

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XTC/3 Operating Manual
2.3.3.2.2 Aux I/O Connector
2.3.3.2.3 Inputs
Inputs are activated by pulling the specific input's terminal to ground (<0.8V)
through a contact closure to common (GND) or with TTL/CMOS logic having
current sink capability of 2 mA (1 low power TTL load). These ports are read
every 250 ms; signals must be present during a read cycle.
Table 2-3 Aux I/O connector
Description Pin # XTC/3S Function
Relay 7 1, 2 Thickness Setpoint
Relay 8 3, 4 Soak 2
Relay 9 5, 6 Crystal Fail
Relay 10 7, 8 Alarms
Relay 11 9, 10 Source 1/Source 2
Relay 12 11, 12 End Deposit (Final Thickness)
TTL Output 1
13 Cruc SRC 1 Bin
18 Crucible Select 1
(if active layer is 0 or 1)
TTL Output 2
14 Cruc SRC 1 Bin
19 Crucible Select 2
TTL Output 3
15 Cruc SRC 1 Bin
20 Crucible Select 3
TTL Output 4
16 Cruc SRC 1 Bin
21 Crucible Select 4
TTL Output 5
17 Cruc SRC 1 Bin
22 Crucible Select 5
TTL Output 6
18 Cruc SRC 1 Bin
23 Crucible Select 6
TTL Output 7
19 Cruc SRC 1 Bin
24 Crucible Select 7
TTL Output 8
20 Cruc SRC 1 Bin
25 Crucible Select 8
Input 9 14 Crucible Valid
Ground 13,15,16,17 Common