INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
to a well controlled rate of evaporant flux. If the required rate
control accuracy cannot be achieved within sixty seconds,
the Delay Failure alarm message will appear. If Stop on
Alarms has been set to Yes, the layer will STOP at the
same time.
Control. . . . . . . . Control Delay state. The Deposit state is entered and the
Control Delay suspends control loop action on the source
control power for the time interval programmed in Control
Delay Time.
Source and sensor shutters are activated during Control
Delay. After the Control Delay Time elapses, control loop
action is initiated.
Both . . . . . . . . . . XTC/3 will first enter a Shutter Delay state followed by
Control Delay.
TRANSFER SENSOR . . . . . . . . . . . Yes / No
Press the TOGL key to move through the choices. Default is No. This feature can
only be enabled when the Delay option Shutter or Both has been enabled. In
addition, a second sensor must be available to use this feature. If set to Yes, XTC/3
will use the second sensor for rate control during the shutter delay time and revert
back to the primary sensor after the shutter delay time has expired.
TRANSFER TOOLING. . . . . . . . . . . 10.0 to 500.0%
This parameter is enabled if Transfer Sensor has been set to Yes. Sets the tooling
factor to use with the Transfer sensor. See Tooling under
CONTROL DELAY TIME . . . . . . . . . 00:00 to 99:59 mm:ss
If Control Delay or Both were selected under the Delay Option, this parameter is
enabled upon entering Deposit and sets the time for which control will be
suspended and the power maintained at the Soak 2 power level. Default is 00:00.
ION ASSIST DEPOSIT . . . . . . . . . . Yes / No
Press the TOGL key to move through the choices. Default is No. Yes activates the
Ion Assist Output upon entering Deposit and deactivates it on leaving Deposit.
NAME (XTC/3M only) . . . . . . . . . . . 15 alphanumeric characters
Accepts up to 15 alphanumeric characters to uniquely identify a film. The film name
can be entered by moving to the Film Name and using the keypad in a manner
similar to a cell phone. For instance, to enter the letter S, press the PQRS key four
times. To enter the letter A, press the ABC key once.
shows a film with
the name: FILM NAME.
Names that have been entered via Communications may contain characters
beyond the 15 alphanumeric ones that can be entered from the front panel.