INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 69)

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XTC/3 Operating Manual
3.5.1 Alarms and Stops
There are a number of unusual XTC/3 situations that may require operator
attention. These situations are detected and then treated as ALARMS or STOPS.
Both ALARMs and STOPs can be indicated by a separate relay closure (by default
or selected assignment in XTC/3M, by fixed assignment in XTC/3S).
An ALARM condition is not fatal, XTC/3 will continue the layer or process
to normal termination.
A STOP is fatal, immediately halting the process. If desired, the user may set the
STOP ON ALARM parameter in the Process sub-screen of the General
Parameter display to configure XTC/3 to treat an ALARM the same as STOP
(i.e., halt processing upon detection of the abnormal condition).
3.5.1.1 Alarms
The following conditions are considered ALARMs by XTC/3 and result in the
closure of the ALARM relay (if assigned):
 Crucible hearth selection is not validated by the CRUC VALID input
within thirty seconds.
 Rate control not established during the first sixty seconds of SHUTTER DELAY
(or twenty times the TIME CONSTANT if greater).
 Rate has been out of control in DEPOSIT for sixty seconds (or twenty times the
TIME CONSTANT if greater). Out of control is defined as a rate error >0.5 Å/s
and >5% of setpoint deposit rate.
 The source power has exceeded the Maximum Power parameter, set in the
Source sub-screen of the Film Parameter display, for five continuous seconds.
3.5.1.2 Stops
The following actions or conditions produce a STOP state. This condition is
indicated by the STOP message on XTC/3 and the closure of the STOP relay
(if assigned):
 An intentional or accidental interruption of power, indicated by
the Power Loss message.
 A Switcher Fail message appears as the result of a failure to detect a valid
position in a multi-position sensor.
 Pressing the front panel STOP key on XTC/3 or handheld controller.
 Initiating a STOP via remote communication.
 Activating the STOP external input.
 A CRYSTAL FAIL detected during any pre-deposit phase (when crystal
switching is not available).