INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual

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XTC/3 Operating Manual

Response:

Parameters>…1 Name>…

Number of Bytes in Response (2 bytes)

All General parameters (4 bytes per parameter)

All parameters for each film (4 bytes per parameter) (9 or 32 films based on
XTC/3S or XTC/3M)

All input definitions (9) (1 byte per input) (XTC/3M only)

All output definitions (20) (1 byte per output) (XTC/3M only)

All output types (20) (1 byte per output) (XTC/3M only)

All Film Names (null terminated) (32 films) (XTC/3M only)

Command ID = 3 “Lower 50 Processes Information” (XTC/3M only)

Response:

…Name>…

Number of Bytes in Response (2 bytes)

Process 1 – 50 layer list (2 byte length (for the number of layers programmed)
followed by 1 byte for each programmed layer)

Process 1 – 50 Names (null terminated)

Command ID = 4 “Upper 49 Processes Information” (XTC/3M only)
Response:

…Name>…
Number of Bytes in Response (2 bytes)
Process 51 – 99 layer list (2 byte length (for the number of layers programmed)
followed by 1 byte for each programmed layer)
Process 51 – 99 Names (null terminated)