INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
Output Set or Clear
To verify operation of outputs, cursor to the desired output and press the TOGL
key. The output state and the set/clear display will change accordingly.
Only active outputs, like Source 1 Shutter, Source 2 Shutter, Sensor 1
Shutter and Sensor 2 Shutter in the
example above, can be
toggled. The cursor will skip over greyed out, indicating they are inactive,
outputs like Advance Crucible 1 and Advance Crucible 2 in the
example above.
Active XIU Test
To initiate the XIU Self Test, disconnect the XIU BNC cable at the sensor
feedthrough, move the cursor onto the item and press the TOGL key. The XIU
Self Test determines whether the Crystal Interface Unit (XIU), interconnect
cable and Measurement circuit for the active sensor are operating properly.
NOTE: The XIU (PN 781-600-GX) must have the 15 cm (6 in.) BNC cable (PN
755-257-G6) attached and must be disconnected from the sensor
feedthrough. The XIU Self Test is not compatible with a 50 cm (20 in.)
BNC cable.
RS-232 Loopback
To initiate the RS-232C COMM PORT self test, install the Loop Back connector,
move the cursor onto the item and press the TOGL key. Upon completion of the
test, the unit will display a message indicating the test was successful and the
COMM PORT is okay; or the test failed and the COMM PORT is bad.
NOTE: The RS-232C Loop Back connector, PN 760-406-P1 must be installed
on XTC/3 RS-232C port for the self-test to work properly.