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2 standard query film name (xtc3/m only), 3 standard query film parameters, 4 standard query general parameter – INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual

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XTC/3 Operating Manual

5.2.2.3.2 Standard Query Film Name (XTC3/M only)

Command:

QN

Film Number = 1-32

Response:

(maximum 15 characters, plus terminating null character)

String = Null terminated series of ASCII characters

5.2.2.3.3 Standard Query Film Parameters

Command:

QF

Command ID = See “UF Command ID” column in

Table 5-2 on page

5-22

.

Film Number = 1-9 (XTC/3S ) or 1-32 (XTC/3M)

Response:

|

Integer = 4 byte, low to high

Float = 4 byte, ANSII standard, single precision, low to high

Description: Type of response depends on command ID, see “DataType /
Format” column of

Table 5-2 on page 5-22

.

Special Case: QF255 will return all film parameters for the
given film, in numeric order.

5.2.2.3.4 Standard Query General Parameter

Command:

QG

Command ID = See “UG Command ID” column in

Table 5-3 on page 5-25

.

Response:

|

Integer = 4 byte, low to high

Float = 4 byte, ANSII standard, single precision, low to high

Description: Type of response depends on command ID, see “DataType /
Format” column of

Table 5-3 on page 5-25

.

Special Case: QG255 will return all general parameters, in numeric order