5 general parameter display – INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
3.3.5 General Parameter Display
Figure 3-8 XTC/3M General Parameter display
NOTE: XTC/3S replaces Process to Run with Film To Run.
XTC/3S does not support AutoStart Next Layer.
The General parameter screen is subdivided into Process, Hardware and
Communication Info screens. The L Lock lock code is initially set in
the Process screen.
If the parameters are locked here, the L Lock message will be displayed in the
upper right corner. The parameters will be displayed, but cannot be accessed.
See
for programming details.
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