INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 209)

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XTC/3 Operating Manual
Chapter A
Material Table
CAUTION
Some of these materials are toxic. Please consult
the material safety data sheet and safety instructions
before use.
An * is used to indicate that a Z-Ratio has not been established for a certain
material. A value of 1.000 is defaulted in these situations.
Table A-1 Material table
Formula Density Z-Ratio Material Name
Ag 10.500 0.529 silver
AgBr 6.470 1.180 silver bromide
AgCl 5.560 1.320 silver chloride
Al 2.700 1.080 aluminum
Al
2
O
3
3.970 0.336 aluminum oxide
Al
4
C
3
2.360 *1.000 aluminum carbide
AIF
3
3.070 *1.000 aluminum fluoride
AIN 3.260 *1.000 aluminum nitride
AlSb 4.360 0.743 aluminum antimonide
As 5.730 0.966 arsenic
As
2
Se
3
4.750 *1.000 arsenic selenide
Au 19.300 0.381 gold
B 2.370 0.389 boron
B
2
0
3
1.820 *1.000 boron oxide
B
4
C 2.370 *1.000 boron carbide
BN 1.860 *1.000 boron nitride
Ba 3.500 2.100 barium
BaF
2
4.886 0.793 barium fluoride
BaN
2
O
6
3.244 1.261 barium nitrate
BaO 5.720 *1.000 barium oxide
BaTiO
3
5.999 0.464 barium titanate (tetr)
BaTiO
3
6.035 0.412 barium titanate (cubic)
Be 1.850 0.543 beryllium