INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
TESTING XIU
XIU test in progress.
TIME POWER
Indicates XTC/3 entered the Time Power mode due to a crystal failure of the
last good crystal and Time Power was set to Yes.
TRANSFER DELAY
Indicates XTC/3 is in the transition from the pre-deposit sensor to the deposit
sensor.
VALUE TOO LOW
Parameter entry is out of range. Allowable values will vary according to your
unit configuration or the parameter being defined. Press CLEAR to delete the
value and enter again.
VALUE TOO HIGH
Parameter entry is out of range. Allowable values will vary according to your
unit configuration or the parameter being defined. Press CLEAR to delete the
value and enter again.
XIU NOT ATTACHED
(Diagnostics Page) XIU and XIU cable are not attached for the specific
sensor channel.
XIU TEST FAILED
The Crystal Interface Unit (XIU) has failed the XIU test.
XIU TEST PASSED
The Crystal Interface Unit (XIU) has passed the XIU test.
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