INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 155)

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XTC/3 Operating Manual
S6 . . . . . . Active layer. x
S7 . . . . . . Active film x
S8 . . . . . . Active sensor. x
S9 . . . . . . Crystal life (%). x % to xx %
S10 . . . . . Power source number. x (1 or 2)
S11 . . . . . Output status - returns a string of 16 ASCII bytes, 1 per output. Each
byte has an ASCII value of 0 or 1, corresponding to the output status.
Response Format (Non-Checksum):
Byte1............Byte16 where byte 1 corresponds to output 1.
Table 5-9 XTC/2 Output Status bits
Output# Output Default
function Output state
1 Source Shutter 1 1=open, 0=closed
2 Source Shutter 2 1=open, 0=closed
3 Sensor Shutter 1 1=open, 0=closed
4 Sensor Shutter 2 1=open, 0=closed
5 Stop 1=Stop, 0=not stop
6 End of Process 1=End of process, 0=not end of process
7 Thickness Setpoint 1=Thk Setpoint
8 Soak 2 1=Soak 2 phase
9 Crystal Fail 1=Xtal Fail
10 Alarms 1=Alarm Cond.
11 Source 1/Source 2,
(toggle) 1=Source 2, 0=Source 1
12 End Deposit
(Final Thickness)
1=End Deposit (Final Thickness) reached
13 Crucible Select LSB
(XTC/2)
BCD value representing crucible position
of active source:
000 = Position 0 or 1
111 = Position 8
14 Crucible Select (XTC/2)
15 Crucible Select MSB
(XTC/2)
16 unused