INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual

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XTC/3 Operating Manual

RECORDER MODE. . . . Rate, Thickness, Power, Rate Deviation.

Press the TOGL key to move through the choices.
Default is Rate.

RANGE . . . . . . . 100, 1000

Press the TOGL key to move through the choices. Default is 1000.

Rate clips at range value. Thickness is done modulo the range, meaning
each time the full scale value is exceeded, the recorder output returns to 0 and
starts to ramp up again to produce a sawtooth output. The Recorder output
voltage is 0 to +10 V.

This parameter is ignored if the recorder mode is power or rate deviation.
Power will always be full-scale 100%.

Rate deviation will always be full scale +/-50 Angstroms/sec. Unit must be in
Deposit and not in Stop to show a rate deviation.

FILTER . . . . . . . . Smooth / Unfiltered (Rate)

Press the TOGL key to move through the choices. Default is Unfiltered rate.
Unfiltered provides 1/4 second measurement value. Smooth provides a
1 second averaged rate value.

This parameter is ignored if the recorder mode is Thickness, Power,
or Rate deviation.

AUDIO FEEDBACK. . . . Yes / No

Press the TOGL key to move through the choices. Default is No for beep off.
Turns the audible feedback for front panel or handheld controller key depression
on or off.

LCD DIMMER TIME. . . . 0 to 99 min

Determines the time before the backlight dims to conserve lamp life. Default is
0 min which disables the dimmer function. If a process is running, the LCD is
illuminated. If a process is not running, the LCD is extinguished.