INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
Response Error Code = 1 byte ASCII
A= Illegal Command
B = Illegal parameter value
C = Illegal ID
D = Illegal format
E = Data not available
F = Cannot do now (some commands require XTC/3 to be 
in Ready/Stop). 
L = Length Error, must be greater than 0 and equal to or 
less than 57,800.
O = Not enough room for response size.
P = Prior command failed (if one command of a multiple command 
packet fails, none of the following commands will be done, and this 
error code will be returned).
Packet Error Code = 1 byte ASCII.
C – invalid checksum
F – illegal format (too many bytes for the commands requested or 
missing value in command)
I – invalid message
L – Length Error, must be greater than 0 and equal to or less 
than 57,800.
M – too many commands (Only 100 allowed)
Checksum . . . . . . . . . . . . . . . . . . . . 1 byte, sum, modulo 256, of all bytes,
including CCB, Timer, and Response 
Message but not including length. 
Timeouts. . . . . . . . . . . . . . . . . . . . . . If more than 3 seconds pass between
characters of a command packet, XTC/3
will time out. No response packet is sent, 
XTC/3 will clear its buffers and assume any 
future characters are the beginning of a 
new packet.
