3 standard query commands, 1 query block – INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
5.2.2.3 Standard QUERY Commands
5.2.2.3.1 Query Block
Command:
QB
Command ID = See listing below
Response:
Depends on Command ID. See listing that follows
Command ID = 1 ”All Parameters”
The command will return all parameters in the following order. Formats are
listed in the individual commands. Maximum bytes allowed in the response are
57,800. A Command Length error code L is returned if there is too much data.
Response:
Number of Bytes in Response (2 bytes)
All General parameters (4 bytes per parameter)
All parameters for each film (4 bytes per parameter) (9 or 32 films based
on XTC/3S or XTC/3M)
All input definitions (9) (1 byte per input) (XTC/3M only)
All output definitions (20) (1 byte per output) (XTC/3M only)
All output types (20) (1 byte per output) (XTC/3M only)
All Film Names (null terminated) (32 films) (XTC/3M only)
Every process layer list for each process (99) (2 byte length (for the number of
layers programmed) followed by 1 byte for each programmed layer) (XTC/3M
only)
All process Names (null terminated) (99) (XTC/3M only)
Command ID = 2 ”All Parameters without Process Layer lists and Process Names”.
Will return all parameters in the following order, with formats as listed in the
individual commands.