INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 97)

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XTC/3 Operating Manual
4.3.1 Process Definition
Figure 4-11 Process screen
4.3.1.1 Process Number
PROCESS . . . . . . . . . . . 1 to 99
Upon entering the Process screen, the process displayed will be the one displayed
when this screen was last left. A different process can be displayed by moving to
the process number parameter and entering the new process number.
4.3.1.2 Process Name
NAME. . . . . . . . . . . . . . . Accepts up to 15 alphanumeric characters.
The process name can be programmed by moving to the process Name and using
the keypad in a manner similar to a cell phone. For instance, to enter the letter S,
press the PQRS key four times. To enter the letter A, press the ABC key once.
If no name is entered, the process number (1 to 99) will be displayed.
Names that have been entered via Remote Communications may contain
characters beyond the 15 alphanumeric ones that can be entered from the
front panel.
4.3.1.3 Building the Layer Sequence
The Select Panel contains sets of 10 layers that can be displayed in the parameter
panel. The
▲ or ▼ arrow keys are used to position the cursor at a specific layer in
the process, or at the blank space after the last defined layer.