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8 standard update process parameters (xtc/3m only) – INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual

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XTC/3 Operating Manual

5.2.2.4.7 Standard Update Output Type Definition (XTC/3M Only)

Command:

UT < Output Type>|< Output Number = 255> < Output 1
Type > < Output 2 Type > … < Output 20 Type >

Output Number = 1-20 (255=All Outputs)

Output Type = (0 = Normally open, 1 = Normally closed)

Response:

None (Just header and trailer)

5.2.2.4.8 Standard Update Process Parameters (XTC/3M only)

Command:

UP []

Command ID = See listing below

Process Number = 1-99

Parameter List = Depends on the Command ID (See listing that follows)

Parameter Value = Depends on the Command ID (See listing that follows)

Response:

None (Just header and trailer)

Command ID = 1 "Layer List"

Parameter List =

Number of Layers = <2 Bytes> Number of layers in this process

Layer n = Film number the layer is to be programmed with. (1 – 32)

n = Number of Layers

Command ID = 2 "Name"

Parameter List =

Process Name = maximum 15 characters, characters are restricted to
hex 20 - hex 7E inclusive, plus null terminating character.

Command ID = 3 "Specific Layer"

Parameter List = Layer to be updated<2 Bytes>

Parameter Value = Film number for given layer to be programmed
(1 – 32)