INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 173)

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XTC/3 Operating Manual
6.3.2 Troubleshooting Transducers/Sensors
Many sensor head problems may be diagnosed with a DVM (Digital Volt Meter).
Disconnect the short oscillator cable from the feedthrough and measure the
resistance from the feedthrough’s center pin to ground. If the reading is less than
1-2 MΩ, the source of the leakage should be found and corrected. Likewise, with
the vacuum system open check for center conductor continuity, a reading of more
than 1 Ω from the feedthrough to the transducer contact indicates a problem.
Cleaning contacts or replacing the in-vacuum cable may be required.
A more thorough diagnosis may be performed with the optional Crystal Sensor
Emulator, PN 760-601-G2. See
section 6.5 on page 6-24 for a discussion of its use
and diagnostic capabilities.
6.3.2.1 Verifying Crystal Switching and Rotation
The Sensor Information screen allows checking active sensor function from XTC/3
front panel. Refer to
section 3.3.8, Sensor Information Display, on page 3-13 .
6.3.2.2 Verifying Sensor Shutter Operation
To exercise the shutter on a Crystal Two, use the Switch Crystal function as
described under
section 3.3.8 . To exercise the shutter on a shuttered sensor,
(Standard, Compact, Sputtering, CrystalSix, Crystal12, Rotary or UHV Bakeable
sensor with shutter), use the Diagnostics screen Toggle Shutter function for the
appropriate sensor per
Figure 6-2 on page 6-6 above.
NOTE: A more detailed troubleshooting guide is shipped with the sensor.
Refer to the sensor operating manual.