INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 142)

5 - 30
PN
07
4-
44
6-
P1
J
XTC/3 Operating Manual
Table 5-4 Standard Status commands
S
(0x53)
Command ID
Description Response:
Description (Data Format) Units -Detail-
0
(0x00)
Process Information:
(only valid for specific
timer tick requested) Returns the following for the timer tick (0x00 to
0xFF) sent
Crystal Status (1 byte)
Bit 0 - 0 = Good, 1 = Failed Crystal
Bit 1 - 0 = Not Switching, 1 = Switching crystal
Bit 2 - 0 Good Reading, 1 = Invalid Reading (reading
is invalid during resonance recovery time of several
seconds following loss of sensor crystal frequency
measurement)
State (1 byte)
Active Sensor (1 byte)
Active Crystal (1 byte)
* Rate (Float) -One second average-
Thickness (Float)
Power (Float)
*Rate Deviation (Float)
Frequency (Int DDS units). -Multiply by 0.0034924596
to convert to hertz.
Returns No Data if the requested timer tick has no
new data to send.-
* If in Stop or not in Deposit, Rate and Rate Deviation
return values of zero.
Procedure for extracting the Invalid Reading byte from the Crystal Status
byte:
1. Send the S1 command to get the rate.
2. From the resulting response packet, find the timer tick value in the fourth
byte of the response packet.
3. Append this timer tick value to the S0 command and send it.
4. Extract the first byte from the Response Message part of the Response
Packet.
5. If bit 2 of that byte is 1, the Crystal Status is invalid, meaning the crystal is in
recovery mode. (The status correlates with the specific rate just received.)
6. Repeat steps 1 to 5
1 (0x01) * Current Rate (Float) Å/Sec -One second rolling average-
2 (0x02) Current Power (Float) %
3 (0x03) Current Thickness (Float) kЕ