1 diagnostic procedures, 1 measurement system diagnostic procedure – INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
6.5.1 Diagnostic Procedures
The following diagnostic procedures employ the Crystal Sensor Emulator to
analyze a constant Crystal Fail message. The symptom is a Crystal Fail message
that is displayed by the Deposition Controller even after the monitor crystal has
been replaced with a new “good” monitor crystal.
6.5.1.1 Measurement System Diagnostic Procedure
1
. Remove the 6 in. BNC cable from the
Feed-Through at point A.
2
Connect the Crystal Sensor Emulator to the 6 in. BNC cable at Point A.
If the XTAL Fail message disappears after approximately five seconds, the
measurement system is working properly. Re-install the 6 in. BNC cable to
the Feed-Through. Go to
.
If the XTAL Fail message remains, continue at step 3.
3
Disconnect the 6 in. BNC cable from the Oscillator and from the Emulator.
4
Visually inspect the 6 in. BNC cable to verify that the center pins are seated
properly.
5
Use an Ohm meter to verify the electrical connections on the 6 in. BNC cable.
There must be continuity (<0.2 Ω) between the center pins.
There must be isolation (>10 MΩ) between the center pins and the
connector shield.
There must be continuity between the connector shields.
Replace the 6 in. BNC cable if it is found to be defective and repeat Step 2 of
this procedure.
6
If the 6 in. BNC cable is not defective, re-connect the 6 in. cable to the oscillator
and to the Crystal Sensor Emulator. If the XTAL Fail message remains, contact
INFICON (refer to
).