INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 145)

5 - 33
PN
07
4-
44
6-
P1
J
XTC/3 Operating Manual
31
(0x1f)
Rolling Average (Float) Å/Sec Returns a rolling 6.25-second average
of the measurement rate. Updated every 0.25
seconds.
32 (0x20) Active Crystal (Byte) Crystal of the current sensor that is in use.
33
(0x21)
Status Messages (4 bytes) Each bit indicates which status message is
displayed.
0x80000000 = Max Power
0x40000000 = Crystal Fail
0x20000000 = Crystal Switch Fail
0x10000000 = Crystal Switching
0x08000000 = Carousel Open
0x04000000 = Control Delay
0x02000000 = Transfer Delay
0x01000000 = Delay Failure
0x00800000 = End of Process
0x00400000 = RateWatcher Delay
0x00200000 = RateWatcher Hold
0x00100000 = RateWatcher Sample
0x00080000 = Crucible Switch Fail
0x00040000 = Soak Hold
0x00020000 = Non Deposit Hold
0x00010000 = Etch Mode
0x00008000 = Local Lock
0x00004000 = Remote Lock
0x00002000 = Test
0x00001000 = Delayed Start
0x00000800 = Testing XIU
0x00000400 = Layer Insert
0x00000200 - 0x00000001 not defined
34 (0x22) Raw Rate (Float) Rate Å/Sec
35
(0x23)
Ethernet parameters (8 bytes) First 4 bytes = IP address (xx.xx.xx.xx)
Second 4 bytes = Net Mask (xx.xx.xx.xx)
where the left most xx group is the MSB in both
Table 5-4 Standard Status commands (continued)
S
(0x53)
Command ID
Description Response:
Description (Data Format) Units -Detail-