INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 171)

6 - 9
PN
07
4-
44
6-
P1
J
XTC/3 Operating Manual
6.3.1 Troubleshooting XTC/3
Table 6-1 Troubleshooting XTC/3
SYMPTOM CAUSE REMEDY
1. power on LED not
illuminated a. blown fuse/circuit breaker
tripped a.have qualified personnel replace
fuse/reset circuit breaker
b. electrical cord unplugged
from wall or back of XTC/3 b. reconnect power cord
c. incorrect line voltage c. have qualified personnel verify line
voltage
2. XTC/3 "locks" up a. cover or back panels not
attached to XTC/3 a. ensure all covers and panels are in
place and securely fastened
b. high electrical noise
environment b. reroute cables to reduce noise pickup
(1 ft away from high power conducting
lines makes a sizable reduction in the
amount of noise entering XTC/3), keep
all ground wires short with large surface
area to minimize ground impedance
c. poor grounds or poor
grounding practice c. verify proper earth ground, use
appropriate ground strap, eliminate
ground loops by establishing the correct
system grounding, verify proper XTC/3
grounding
3. XTC/3 does not retain
parameters on power
down (loss of parameters
on power up) a. faulty static RAM a. SRAM battery has a normal life
expectancy of ten years. If your XTC/3
has an SRAM problem contact
INFICON
b. power supply problem b. contact INFICON
c. dead battery c. contact INFICON.
4. some keys on front
panel function while
others do not a. faulty keypad or faulty
keypad ribbon cable a. contact INFICON
5. all keys on the front
panel fail to function a. XTC/3 is "locked" up a. turn power to OFF or to STBY, then to
ON, see item 2 above
6. control voltage output
does not function properly a. XTC/3 damaged from
applying voltage to the control
voltage output a. ensure cable connection to the
Source output does not have a potential
across the contacts, contact INFICON
b. reversed polarity of control
voltage relative to that
accepted by the source power
supply b. verify Source output polarity and the
required input polarity of the source
power supply, refer to the instruction
manual to reconfigure XTC/3 if
necessary
c. improper control cable
fabrication c.check for correct cable wiring
in the appropriate section of the manual