INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 152)

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XTC/3 Operating Manual
12 Xtal Switch S 0 - 9 (See XTC/2 manual section 4.6)
13 Xtal Switch Q 0 - 9 (See XTC/2 manual section 4.6)
14 Tool Factor 1 10 - 500.0
15 Tool Factor 2 10 - 500.0
16 Deposition Rate 0 - 999.9
17 Final Thickness 0.0 - 999.9
18 Thickness Spt 0.0 - 999.9
19 Density 0.5 - 99.99
20 Z-Ratio 0.1 - 9.999
21 Sensor 1 - 2
22 Source 1 - 2
23 Crucible 0 - 8
24 Control Gain 0.01- 100.0
25 Control TC 0.1 - 100
26 Control DT 0.1 - 100
27 Max Power 0.0 - 100.0
28 Sample 0 - 99
29 Hold Time 0 - 5999 or 00:00 - 99:59
30-39 ** NOT USED **
40 Layer 1-3 1 0-9 2
99 All
1) May be 0 for Q command; if 0, will return values for layers 1 - 3.
In an XTC3/S there is only one layer. Q 40 2 or Q 40 3 returns an error.
Q 40 0 returns 1 0 0. In XTC/3M, if there is no film in the layer, Q 40 2 or Q 40 3 will
return a NO DATA error.
2) Only applies to U 40 command. 0 is not allowed for layer 1.
Table 5-7 XTC/2 parameter definition table (for QUERY and UPDATE commands)
XTC/2 PP XTC/3 Parameter Range