2 sensor installation – INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
2.1.2 Sensor Installation
shows a typical installation of an INFICON water cooled crystal sensor
in the vacuum process chamber. Use the illustration and the following guidelines to
install sensors for optimum performance and convenience.
Figure 2-1 Typical installation
>
Mounting Brackett
Coax Cable
(Routed with
water tubes)
Braze/Weld Joint
or Compression Fittings
Source to Sensor
(10 in. Minimum)
Sensor
Shutter
Source
Pneumatic
Actuator
IPN 750-420-G1
Solenoid
Valve
Instrument Chassis
To
Source Controller
XIU (Oscillator)
To
Sensor
Shutter
Water In
Water Out
Air Supply
Source
Shutter
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