INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 73)

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XTC/3 Operating Manual
A crystal (sensor in the case of Dual Head) switch will automatically occur when:
 XTC/3 is configured for a CrystalTwo or Dual Head sensor type, a film is
STARTed or running and there is another good crystal available when the
active crystal fails.
 XTC/3 is configured for a CrystalSix or Crystal12, a film is STARTed or
running, and there is at least one good crystal left in the carousel when the
active crystal fails.
 XTC/3 is configured for a Rotary sensor, the film is STARTed or running, and
there is at least one remaining good position in the Rotary sensor when the
active crystal fails.
During a crystal switch while in Deposit, the thickness will be accumulated at the
setpoint rate. Power will be held constant at the average deposition power during
the prior 6.25 seconds, not counting the last two seconds.
A crystal switch will not automatically occur:
 During a state of STOP, READY, or IDLE.
 During deposition, if the secondary crystal of a Dual Sensor fails, or the last
good crystal of a Rotary, CrystalSix, or Crystal12 fails, a TIME-POWER or
STOP will occur, depending on whether TIME-POWER option Yes or No
is chosen.)
A crystal switch can be manually executed via the front panel XTSW key, handheld
controller or remote communications when the system is configured for
CrystalTwo, CrystalSix, Crystal12, Rotary or Dual Head sensors.
NOTE: The crystal fail message appears when no more good crystals remain.
3.6.8.1 CrystalTwo
In the case of the CrystalTwo (PN 750-212-G2 Dual Sensor with PN 779-220-G1
or PN 779-220-G2 XTAL 2 Switch), the CrystalSwitch output must be wired so that
it simultaneously energizes the:
 Solenoid Valve (PN 750-420-G1) which applies the air pressure to actuate the
dual sensor shutter mechanism.
 RF relay in the XTAL 2 Switch, exposing crystal #2 while covering crystal #1
and rerouting the RF signal.
This allows the dual sensor to be operated with only one oscillator kit and requires
only one sensor connection at the controller. Power-up initialization is performed
on a dual sensor to verify that the back-up crystal is good. If a crystal fail occurs
while in Deposit, the XTC/3 will switch to the backup crystal and continue. If
START is attempted following completion of the layer and the next layer uses the
same sensor, START will not be accepted (unless Start Without Backup is set to
Yes), and the message No Backup Crystal appears.