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INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual

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XTC/3 Operating Manual

For more information about Inficon’s full line of QCM sensors, please contact your
local Inficon representative or visit www.inficon.com.

Table 1-1 Crystal12 sensor

Crystal12 Sensor Package XL12-xxxxX

XL12-

Base Unit

None

0

Crystal 12 Sensor

1

In-Vacuum Cable Assembly Length

None

0

78 cm (30.75 in.)

1

15.2 cm (6 in.)

2

30.5 cm (12 in.)

3

61 cm (24 in.)

4

91.4 cm (36 in.)

5

121.9 cm (48 in.)

6

152.4 cm (60 in.)

7

182.9 cm (72 in.)

8

Crystal Carousel Assembly

One (Included in Base Unit)

0

Spare Crystal Carousel Assembly

1

Front Deposition Shield

One (Included in Base Unit)

0

Spare Front Deposition Shield

1

Mounting Post with Hardware

None 0

Mounting Post Kit

1

Example: Crystal12 sensor with 78 cm (30.75 in.) cable, spare
carousel, spare front deposition shield, mounting post kit, and
solenoid valve is PN XL12-11111.