INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
Operate Display Description (refer to
)
1. Layer Currently In Process (Film in XTC/3S)
2. Layer Time
3. Process Time (XTC/3M only)
4. % Power
5. Rate
6. Graphical Display of Rate Deviation or Power
7. Layer Thickness
8. Lock Status Area
9. Test Mode Indicator
10. State of Layer
11. State Time
12. Source Number In Use
13. Sensor Number In Use, Crystal in Use (if multi-position sensor)
14. % Crystal Life
15. S and Q Counters (if set to non-zero values)
16. Process Name Being Executed (XTC/3M only)
17. Film Name Being Deposited (Always Film in XTC/3S)
18. Message Area
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