4 bakeable sensor – INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
6.4.4 Bakeable Sensor
For the Bakeable sensor, the procedure is the same as the Front Load Single
sensor except that the cam assembly must be unlocked by flipping it up. Once the
crystal has been replaced, place a flat edge of the holder flush with the cam
mechanism and lock it in place with the cam. See
.
Figure 6-6 Bakeable crystal sensor
Contact
PN 007-099
Insulator
PN 007-103
Spreader Bar
PN 007-267-P2
Shoulder Washer
PN 007-268-P1
Two Required
Shoulder Washer
PN 007-269-P1
Cam Mechanism
PN 007-168
Cover
PN 007-101
Clamping Spring PN 007-094
Crystal Retainer PN 007-064
Fully Coated Face (Gold)
Crystal PN 008-010-G10
Crystal Holder &
Retainer Spring
PN 007-154
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