INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 126)

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XTC/3 Operating Manual
5.2.2.3.5 Standard Query Input Definition (XTC/3M Only)
Command:
QI
Input Number = 1-9, 255 (255=All 9 inputs)
Response:
If Input Number was 1 – 9:
If Input Number was 255:
…
Input Definition = < Byte > As decoded below
0 Blank (Input not used)
1 Start
2 Stop
3 End Deposit
4 Rate Watcher Hold Initiate
5 Rate Watcher Hold Inhibit
6 Crystal Fail Inhibit
7 Zero Thickness
8 Soak 2 Hold
9 Crucible 1 Valid
10 Crucible 2 Valid
11 Reset
12 Select Process 1-4, 2 bits*
13 (Select Process 1-4, 2 bits, bit 2)
14 Select Process 1-16, 4 bits*
15 (Select Process 1-16, 4 bits, bit 2)
16 (Select Process 1-16, 4 bits, bit 3)
17 (Select Process 1-16, 4 bits, bit 4)
18 Select Process 1-64, 6 bits*
19 (Select Process 1-64, 6 bits, bit 2)
20 (Select Process 1-64, 6 bits, bit 3)
21 (Select Process 1-64, 6 bits, bit 4)