Chapter 1 introduction and specifications, 1 introduction, Chapter 1 – INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
Chapter 1
Introduction and Specifications
1.1 Introduction
XTC/3 is produced in two versions:
XTC/3M Multi-Layer Deposition Controller
XTC/3S Single Layer Deposition Controller
This manual covers both instruments, using the designation XTC/3 when
the subject matter applies to both instruments and XTC/3M or XTC/3S when the
subject matter applies to a specific instrument.
This Operating Manual provides user information for installing, programming, and
operating the XTC/3.
XTC/3 is a closed loop process controller designed for use primarily in physical
vapor deposition. XTC/3 monitors and/or controls the rate and thickness of thin film
depositions. Deposition rate and thickness are inferred from the frequency change
induced by mass added to a quartz crystal.
This technique positions sensors in the path between, or to the side of, the target
substrate and the source of vaporized material. The sensor incorporates an
exposed oscillating quartz crystal whose frequency decreases as material
accumulates. The change in frequency provides information to determine rate and
thickness and to continually control the evaporation power source.
With user-supplied time, thickness and power limits and with desired rates and
material characteristics, XTC/3 is capable of automatically controlling the process
in a precise and repeatable manner. User interaction is accomplished through the
front panel or serial communications, and consists of selection or entry of
parameters to define the process.
The complete system consists of a:
main control unit (XTC/3)
sensor or sensors
crystal interface unit (XIU) for each attached sensor
These items are generally bundled at the factory and are also sold separately.
When reading this XTC/3 Operating Manual, please pay particular attention to the
NOTES, CAUTIONS, and WARNINGS found throughout the text. The Notes,
Cautions, and Warnings are defined in
.