INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 127)

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XTC/3 Operating Manual
22 (Select Process 1-64, 6 bits, bit 5)
23 (Select Process 1-64, 6 bits, bit 6)
24 Select Process 1-99, 7 bits*
25 (Select Process 1-99, 7 bits, bit 2)
26 (Select Process 1-99, 7 bits, bit 3)
27 (Select Process 1-99, 7 bits, bit 4)
28 (Select Process 1-99, 7 bits, bit 5)
29 (Select Process 1-99, 7 bits, bit 6)
30 (Select Process 1-99, 7 bits, bit 7)
31 Switch Crystal
32 Non-Deposit Hold
33 Zero Film Time
34 Start Inhibit
35 Soak 1 Hold
* Querying an input that corresponds to a secondary bit of one of the select
processes will return the corresponding number. For individual updates, only the
primary bit can be set. The corresponding secondary bits will be set automatically.
For a block update (UI 255 or UB x, see below), when a select process is set, the
primary bit must be set. Each additional bit corresponding to the select process
must have the proper corresponding number, or 0.
5.2.2.3.6 Standard Query Output Definition (XTC/3M Only)
Command:
QO
Output Number = 1-20, 255 (255=all outputs)
Response:
If Output Number was 1 – 20:
If Output Number was 255:
…
Output Definition = as decoded below
0 Blank (Output not used)
1 Source Shutter 1