INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 56)

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XTC/3 Operating Manual
3.3.4 Process List Display (XTC/3M only)
The Process screen is present only in XTC/3M.
XTC/3S is a single process, single layer controller.
Figure 3-7 XTC/3M Process display
A process consists of one or more layers, to be run in order. See section 4.3 on
page 4-16 for programming details. 99 Processes may be programmed, each with
up to 999 Layers.
On entering the Process screen, the process displayed is the process when the
Process screen was last displayed. A different process can be displayed by
moving to the process number parameter, entering the desired process number
and pressing ENTER.
If the parameters are locked, the L Lock or R Lock message will be displayed in
the upper right corner. The process list will be displayed, but cannot be changed.
However, the process number may still be changed to allow viewing of other
processes.
The Select panel contains sets of 10 layers that can be displayed
in the parameter panel.