INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 85)

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XTC/3 Operating Manual
4.2.3 Film Definition Parameters
The Film parameters are entered in the Pre/Post, Deposit, Sensor, Source and
Option screens.
4.2.3.1 Pre/Post Deposition Parameters
RISE TIME 1 . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
This parameter provides the time period over which the source power
is ramped from 0 to SOAK POWER 1. The default value is 00:00.
SOAK POWER 1 . . . . . . . . . . . . . . . 0.0 to 100%
This parameter is usually set to the power level at which the source material
just begins to melt. XTC/3 ramps the power level from zero to
SOAK POWER 1 linearly over the time period RISE TIME 1.
The default value is 0%.
SOAK TIME 1 . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
This parameter provides the time period for which XTC/3 holds at
SOAK POWER 1. The default value is 00:00.
RISE TIME 2 . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
This parameter provides the time period over which the source power is
ramped to SOAK POWER 2. The default value is 00:00.
SOAK POWER 2 . . . . . . . . . . . . . . . 0.0 to 100%
This parameter is usually set to the power level at which the source material
evaporates material at about the target rate. XTC/3 ramps the power level from
SOAK POWER 1 to SOAK POWER 2 linearly over the time period
RISE TIME 2. The default value is 0%.
SOAK TIME 2 . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
This parameter provides the time period for which XTC/3 holds at
SOAK POWER 2. The default value is 00:00.