5 option – INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual

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XTC/3 Operating Manual

4.2.3.5 Option

Figure 4-9 XTC/3M Option Film Programming screen

TIME POWER . . . . . . . . Yes / No using TOGL key. Default is No.

The Time-Power state will only be entered while XTC/3 is in the DEPOSIT or
RATE RAMP state and the film program has been set to complete on Time-Power
in the event of a failed crystal when there is no backup crystal. If a crystal fail is
detected during the pre-deposit states XTC/3 will not sequence further, causing an
XTC/3 STOP even if the complete on Time-Power (Yes) option is selected.

Once in the Time-Power state, the source power will remain at the four seconds
average power value of the source control output computed two seconds prior to
the failure. (These times are appropriately modified for PID control.) Thickness is
accumulated at the programmed deposition RATE value. The Time-Power state
will terminate when the FINAL THICKNESS value has been exceeded.
Any post-deposit states will be executed exactly as if a normal deposition had
occurred. When the post-deposit states are complete, XTC/3 will end the layer and
display STOP. A RATE RAMP cannot be executed in Time-Power and that state
is consequently skipped.

DELAY OPTION. . . . . . . . . . . . . . . . None, Shutter, Control, Both.

Press the TOGL key to move through the choices. The default value is None for
no delay chosen.

Shutter. . . . . . . . Shutter Delay state immediately following Soak Power 2

and preceding DEPOSIT. The source shutter relay remains
in its normal state and the sensor shutter relay is active. The
sensor, which must be positioned to sample the source flux
with the source shutter closed, provides closed loop rate
control.

Rate control must be maintained at +/-5% or +/- 0.5 Å/sec,
whichever is greater, of the desired deposition rate for five
seconds before XTC/3 will enter the DEPOSIT state,
opening the source shutter and thus exposing the substrate