INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 130)

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XTC/3 Operating Manual
5.2.2.3.7 Standard Query Output Type Definition (XTC/3M Only)
Command:
QT
Output Number = 1-20, 255 (255=all outputs)
Response:
If Output Number was 1 – 20:
If Output Number was 255:
< Output 1 type > < Output 2 type > … < Output 20 type >
Output type =
0 = Normally open
1 = Normally closed
5.2.2.3.8 Standard Query Process Parameters (XTC/3M Only)
Command:
QP []
Command ID = See listing below
Process Number = 1-99
= Depends on Command ID (See listing that follows)
Response:
Depends on Command ID. See listing that follows
Command ID = 1 "Layer List"
Response:
…
Number of Layers = <2 Bytes> n = Number of layers in this process
Layer n = Film number of each layer, 1 to n, when n = Number of
Layers
Command ID = 2 "Name"
Response:
Process Name = maximum 15 characters plus null terminating
character.