INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 146)

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XTC/3 Operating Manual
5.2.2.6 Standard REMOTE Commands
R ()
Command ID = . See "R Command ID" column in Table 5-5 .
Action Value = |
Float = 4 byte, ANSII standard, single precision, low to high
A few commands have a value with them. See Table 5-5 .
Response = None (Just header and trailer)
Table 5-5 Standard remote commands
R
(0x52)
Command
ID
Function Description
0 (0x00) Start Starts the next layer of the active process.
1
(0x01)
Stop Stops the layer, puts power to zero,
closes shutters, etc.
2
(0x02)
Reset If in Stop, resets XTC/3 to the Ready state, at the
beginning of the process.
3
(0x03)
Remote lock on Prevents the update of parameters via
the front panel.
4 (0x04) Remote lock off Removes the remote lock.
5
(0x05)
Crystal fail inhibit on Prohibits the crystal fail relay from activating.
6 (0x06) Crystal fail inhibit off The crystal fail relay will act normally.
7
(0x07)
Soak Hold 2 on Will cause the unit to stay in Soak 2 state, once
entered, until the Soak Hold is removed (R8)
8 (0x08) Soak Hold 2 off Will allow the unit to leave the Soak 2 state.
9 (0x09) Manual on Places the unit in the Manual power state.
10
(0x0a)
Manual off Removes the unit from Manual power state, and
puts it into the Deposit state.
11
(0x0b)
Set power to vv Active layer to vv % power.
vv = 0 - 100 (Note: Only allowed if
current state is Manual)
12 (0x0c) Zero thickness Zeroes the thickness of the current layer.