INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 78)

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XTC/3 Operating Manual
When XTC/3 is placed in the Manual Power mode by pressing the MPWR key,
power is affected by moving the POWER/STOP switch laterally. A STOP is
produced by pressing POWER/STOP.
A crystal switch is activated by pressing the red button on the body of the XTC/3.
This action alternates the active crystal of a dual head configuration or advances
the multi-position sensor to the next available crystal.
NOTE: Upon leaving the MANUAL POWER state, XTC/3 enters the DEPOSIT
state. The deposition will terminate if the Final Thickness parameter value
has been exceeded.
The Hand-held Controller includes a convenience hook for the controller that can
be attached to XTC/3 or other accessible location.
3.6.12 Lock Code
If a Lock Code has been entered in the Process sub-screen of the General
Parameter screen, the L Lock message will be displayed. If XTC/3 has been
locked via Remote Communications, the R Lock message will be displayed.
Parameters may be viewed but not changed from the front panel, unless the
lock code is reentered on the Menu screen while the cursor is positioned at
the LOCK Code selection.
A lost lock code may be cleared by pressing the CLEAR key immediately on
power-up and holding it briefly. User programmed parameters will be retained.
NOTE: If no lock code is present, all parameters will be cleared.
3.6.13 Parameter Clear
If no Lock Code is present, all user-programmed parameters are cleared, except
for the IP Address, setting them to their default values, by pressing the CLEAR key
on power up. Repeat the process if a Lock Code was present.
3.6.14 Datalog
If the communication type is set to Datalog, the RS-232 port will become a "send
only" port (i.e., will not accept commands from a remote computer). When a layer
leaves deposit (either at the end of deposit or following a Stop), a stream of data
will be output. The data is a series of ASCII strings, each separated by a carriage
return and a line feed, in the order below:
1 Layer x
2 Film x (x = film number or the name if the name (XTC/3M only) is programmed)
3 Rate = xxx.x Å/s (0.0 - 999.9)
4 Thickness x Å (x = 0 - 999999 Angstroms)
5 Deposit Time = xx:xx Min:S