5 sputtering sensor – INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
6.4.5 Sputtering Sensor
Observe the general precautions for replacing crystals and follow the instructions
below to replace the crystal in a sputtering sensor.
1
Grip the body assembly with your fingers and pull it straight out to separate it
from the water-cooled front part. (You may have to disconnect the sensor cable
in order to separate the parts.) See
.
2
Pull the crystal holder straight out from the front of the sensor.
3
Remove the ceramic retainer from the crystal holder by pulling it straight out
with the crystal snatcher (see
4
Turn the crystal holder over so that the crystal drops out.
5
Install a new crystal into the crystal holder with the patterned electrode facing
the back and contacting the leaf springs on the ceramic retainer. (Use only
special crystals for sputtering, PN 008-009-G10.)
6
Put the ceramic retainer back into the crystal holder and put the holder into the
front cover of the sensor.
7
Align the position of the back part so that the connector matches with the notch
on the front of the sensor. Snap the two parts together. Reconnect the sensor
cable if it has been disconnected.
Figure 6-7 Sputtering crystal sensor
Body Assembly
PN 750-619-G1
Ceramic Retainer
PN 007-023
Crystal
PN 008-009-G10
(Silver)
Crystal Holder
PN 007-049
Sensor
Front Cover
PN 007-047
In-vacuum Cable
Assembly (30.75 in. [781 mm])
PN 007-044