INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual

Page 164

6 - 2

XTC/3 Operating Manual

DIGITAL INPUT

Unit has gone into STOP because the designated Stop Input was activated.

EMPTY PROCESS

Indicates that the selected process has no layers and therefore cannot
be selected to run.

END OF PROCESS

Indicates that the last layer in the process has reached the Idle state.

ETCH MODE

Indicates that XTC/3 is in the etch mode.

ETHERNET IN USE

Ethernet values cannot be changed at this time.

ETHERNET VALUES HAVE CHANGED

Changes take effect on power up.

FRONT PANEL

Indicates that XTC/3 was stopped by pressing STOP on the front panel

HANDCONTROL

Indicates that XTC/3 was stopped by pressing STOP on the
Handheld Controller.

INCORRECT TIME

Incorrect value was entered.

INPUT INCORRECT

Incorrect lock code was entered to unlock the unit.

INVALID MASK

Gateway mask value is Incorrect.

L LOCK

Indicates XTC/3 is in a Local Program Lock mode. This prohibits any
parameter from being entered from the front panel until the Program Lock
Code is entered.

LAYER INSERT

Appears in Process List to indicate that Layer Insert was successful.

MAX POWER

Indicates the specified maximum power has been reached. The power value
will be displayed in red.

NO BACKUP CRYSTAL

An attempt is being made to start a layer and there are no good crystals
remaining in the sensor head. This message will appear unless ’Start without
Backup’ is enabled.

NO GOOD XTAL TO SW

There are no good crystals available to switch to.